ZMI-2002 8020-0211-1-J 双轴6U VME测量板

ZMI-2002 8020-0211-1-J 双轴6U VME测量板

ZMI-2002 8020-0211-1-J 是 ZYGO 的一款双轴 6U VME 测量板，专为各种工业应用中的高精度 2D 位移和角度测量而设计。它是 ZYGO ZMI 系列的一部分，以其准确性而闻名，可靠性和多功能性。

ZMI-2002 8020-0211-1-J 双轴 6U VME 测量板的主要特点：

高精度测量：提供高精度的 2D 位移和角度测量，分辨率高达 0。1μrad（微弧度）。

非接触式测量：利用非接触式激光干涉测量法进行精 确测量，而不会干扰目标表面。

宽测量范围：提供高达 100 mm （3.94 英寸）用于位移，±6 度用于角度。

高速数据采集：支持高达1kHz的高速数据采集速率，实现实时测量和分析。

双轴同步测量：在两个轴上同时进行测量，提供同步的位置和角度数据。

VMEbus 接口：具有 VMEbus 接口，可轻松集成到基于 VME 的系统中。

软件开发工具包 （SDK）：包括用于应用程序开发和数据分析的综合软件开发工具包 （SDK）。

ZMI-2002 8020-0211-1-J 双轴 6U VME 测量板的应用：

半导体计量：用于半导体计量，用于晶圆对准的高精度测量，掩模放置，和芯片功能。

精密制造：用于精密制造应用，用于机加工零件的质量控制和尺寸验证。

光学计量：在光学计量中用于光学元件的对准和定位，例如镜子和镜头。

结构分析：用于结构分析以测量变形，振动以及结构中的应力分布。

研究与开发：用于研究材料特性的研发应用，动态行为，和控制系统。

总体而言，ZMI-2002 8020-0211-1-J 双轴 6U VME 测量板作为精 确、可靠和多功能的解决方案脱颖而出，适用于各种工业和科学应用中的高精度 2D 位移和角度测量。

ZMI-2002 8020-0211-1-J 双轴6U VME测量板

The ZMI-2002 8020-0211-1-J is a dual-axis 6U VME measuring board from ZYGO designed for high-precision 2D displacement and Angle measurement in a variety of industrial applications. It is part of the ZYGO ZMI series and is known for its accuracy, reliability and versatility.

ZMI-2002 8020-0211-1-J Dual-axis 6U VME measuring board Main features:

High precision measurement: Provides high precision 2D displacement and Angle measurement with resolution up to 0. 1μrad (microradian).

Non-contact measurement: Precise measurements are made using non-contact laser interferometry without interfering with the target surface.

Wide measuring range: Available up to 100 mm (3.94 in) for displacement and ±6 degrees for Angle.

High-speed data acquisition: Supports high-speed data acquisition rates up to 1kHz for real-time measurement and analysis.

Biaxial synchronous measurement: Measurements are taken simultaneously on both axes to provide synchronous position and Angle data.

VMEbus interface: Features a VMEbus interface for easy integration into VME-based systems.

Software Development Kit (SDK) : Includes a comprehensive software development kit (SDK) for application development and data analysis.

ZMI-2002 8020-0211-1-J Dual-axis 6U VME measuring board Application:

Semiconductor metering: Used for semiconductor metering, high-precision measurement for wafer alignment, mask placement, and chip functions.

Precision manufacturing: For precision manufacturing applications, for quality control and dimensional verification of machined parts.

Optical metrology: Used in optical metrology for the alignment and positioning of optical components, such as mirrors and lenses.

Structural analysis: Used in structural analysis to measure deformation, vibration, and stress distribution in structures.

Research and development: Research and development applications for studying material properties, dynamic behavior, and control systems.

Overall, the ZMI-2002 8020-0211-1-J biaxial 6U VME measuring board stands out as a precise, reliable and versatile solution for high-precision 2D displacement and Angle measurement in a variety of industrial and scientific applications.